Probe card, probe card manufacturing method, and contact

摘要

A probe card including a minute and highly accurate probe pin, including a probe pin electrically connecting with the electronic device; and a wiring substrate including a wiring electrically connecting with the probe pin. The probe pin includes: a first end electrically connecting with the wiring; a contact section extending from the first end to a direction away from the wiring substrate, the contact section being formed to oppose the wiring substrate and electrically connecting with the electronic device; a second end extending from the contact section and electrically connecting with the wiring; and a hollow section formed in an area sandwiched between the wiring substrate and the contact section.