摘要 |
A substrate transport apparatus comprising a drive section (42), an articulated arm (44), and a gripper. The articulated arm (44) is connected to the drive section (42). The articulated arm (44) has an end effector (64) for transporting a substrate (S). The gripper is connected to the end effector (64) for holding the substrate (S) on the end effector (64). The gripper has at least two actuated contact pads (40, 42) for gripping the substrate (S). The two actuated contact pads (40, 42) are disposed on the end effector (64) so that when actuated the eontact pads (40, 42) are translated inwards relative to the end effector (64) to grip the substrate (S) and position a center of the substrate (S) to a predetermined location on the end effector (64) irrespective of a dimensional variance of the substrate (S). |