REPLACEABLE TARGET SIDEWALL INSERT WITH TEXTURING

摘要

This invention provides a sputter target (30) and backing plate (60) assembly having a replaceable sputter target sidewall insert (10). The replaceable sidewall insert (10) enhances the effectiveness and useful life of the assembly by replacing only the insert portion of the sidewall (10) when needed, while retaining the remaining portions of the target (30) for additional use. The sidewall insert (10) is secured to the target (30) and backing plate (60) in corresponding grooves (66) provided in the target (30) and backing plate (60). A textured surface (16) such as a continuous textured coating may be applied to the sidewall insert (10) to further enhance particle retention properties of the target/backing plate assembly.