| 发明名称 |
Selection of wavelengths for integrated circuit optical metrology |
| 摘要 |
Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.
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| 申请公布号 |
US2003225535(A1) |
申请公布日期 |
2003.12.04 |
| 申请号 |
US20020162516 |
申请日期 |
2002.06.03 |
| 申请人 |
DODDI SRINIVAS;LANE LAWRENCE;VUONG VI;LAUGHERY MIKE;BAO JUNWEI;BARRY KELLY;JAKATDAR NICKHIL;DREGE EMMANUEL |
发明人 |
DODDI SRINIVAS;LANE LAWRENCE;VUONG VI;LAUGHERY MIKE;BAO JUNWEI;BARRY KELLY;JAKATDAR NICKHIL;DREGE EMMANUEL |
| 分类号 |
G01B11/02;G01B11/00;G01B11/06;G01B11/24;H01L21/02;(IPC1-7):G01B11/14;G06F19/00 |
主分类号 |
G01B11/02 |
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