发明名称 Semiconductor chip separation and handling method uses push rod for transfer of separated semiconductor chip from saw frame to transport band
摘要 The method has a semiconductor wafer sawed along defined lines via a saw foil (8), for separation into individual semiconductor chips (5), released via a transport rod (11) pushed through the saw foil into contact with the semiconductor chip, which is transferred to a transport band (13,14) on the opposite side.
申请公布号 DE10215083(C1) 申请公布日期 2003.12.04
申请号 DE20021015083 申请日期 2002.04.05
申请人 INFINEON TECHNOLOGIES AG 发明人 WINTER, SYLVIA
分类号 H01L21/301;H01L21/68;H01L21/78;(IPC1-7):H01L21/50 主分类号 H01L21/301
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