| 发明名称 |
SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION |
| 摘要 |
<p>A system and method for detecting a fluid flow where a fluid passing through a conduit (310) passes through detection electronics (330, 320, and 340) producing signals indicative of the fluid flow in sensor electronic control means (350).</p> |
| 申请公布号 |
WO03100391(A1) |
申请公布日期 |
2003.12.04 |
| 申请号 |
WO2003US16440 |
申请日期 |
2003.05.23 |
| 申请人 |
MYKROLIS CORPORATION;TISON, STUART, A.;LU, SHILIANG |
发明人 |
TISON, STUART, A.;LU, SHILIANG |
| 分类号 |
G01F1/00;C01B17/22;G01F1/12;G01F1/48;G01F1/50;G01F1/68;G01F1/684;G01F1/696;G01F5/00;G01F25/00;G01L27/00;G06F19/00;(IPC1-7):G01N21/00 |
主分类号 |
G01F1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
