METHOD FOR PRODUCING POROUS METAL BY COMPOSITE PHYSICAL VAPOUR DEPOSITION AND THE EQUIPMENT THEREOF

摘要

ABSTRACT: This invention relates to a method for producing porous metal by composite physical vapour deposition technique and the equipment thereof, characterised in that any two or three methods selected from evaporation, sputtering or ion plating are combined together, and thus this method is good in plating uniformity, and applicable in high speed PVD equipments and high speed electrodeposit devices. The produced foam nickel is the ideal material for electrode substrate material of nickel-hydrogen, nickel-cadmium and nickel-zinc batteries. One embodiment of the equipment thereof comprises a main part including wrapup chamber, wrapup roller, measure roller, megnetron sputtering chamber, megnetron target, arc evaporation chamber, arc evaporation target, separator, cooling water jacket, special treatment chamber, guide roller, release chamber, and release roller, and an auxiliary part, and also a megnetron inlaid target and a water cooled separator of the plating chamber matching the whole equipment. This invention overcomes the drawbacks of prior art utilising only single technique, and exhibits good technique character.