发明名称 |
Method and system for estimating microelectronic fabrication product yield |
摘要 |
Within a method for estimating a microelectronic fabrication product yield and a system for estimating the microelectronic fabrication product yield there is employed a specific mathematic algorithm for estimating yield of a new microelectronic fabrication product within at least one microelectronic fabrication facility. The specific algorithm is solved incident to parametric data correlation with existing production data within the at least one microelectronic fabrication facility.
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申请公布号 |
US2003225475(A1) |
申请公布日期 |
2003.12.04 |
申请号 |
US20020162275 |
申请日期 |
2002.06.04 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIAO YUN-WEI;KA REGINA;CHU MEI-LING |
分类号 |
G06Q10/00;G06Q50/00;(IPC1-7):G06F19/00 |
主分类号 |
G06Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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