发明名称 Method and system for estimating microelectronic fabrication product yield
摘要 Within a method for estimating a microelectronic fabrication product yield and a system for estimating the microelectronic fabrication product yield there is employed a specific mathematic algorithm for estimating yield of a new microelectronic fabrication product within at least one microelectronic fabrication facility. The specific algorithm is solved incident to parametric data correlation with existing production data within the at least one microelectronic fabrication facility.
申请公布号 US2003225475(A1) 申请公布日期 2003.12.04
申请号 US20020162275 申请日期 2002.06.04
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LIAO YUN-WEI;KA REGINA;CHU MEI-LING
分类号 G06Q10/00;G06Q50/00;(IPC1-7):G06F19/00 主分类号 G06Q10/00
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