METHOD AND DEVICE FOR PLASMA TREATING WORKPIECES

摘要

Disclosed are a method and a device for plasma treating workpieces (5). The workpiece is inserted into a chamber (4) of a treatment station (3), which can be at least partly evacuated, and is positioned within said treatment station by means of a holding element. A connection of the chamber to at least one unit supplying operating means is controlled by a valve block (54) which comprises at least two valves (59, 60, 61) and is disposed near a floor (29) of the chamber.