A probe measurement system (40-43, 90, 80, 85, 90, 94) for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.
申请公布号
WO03100445(A2)
申请公布日期
2003.12.04
申请号
WO2003US16322
申请日期
2003.05.23
申请人
CASCADE MICROTECH, INC.;GLEASON, K., REED
发明人
LESHER, TIM;ANDREWS, MIKE;MARTIN, JOHN;DUNKLEE, JOHN;HAYDEN, LEONARD;SAFWAT, AMR, M., E.;STRID, ERIC
