METHODS AND SYSTEMS FOR IDENTIFYING AND/OR REMOVING AN OXIDE-INDUCED ZONE OF DEFECTS IN A SEMICONDUCTOR DEVICE STRUCTURE

摘要

A method and system for identifying and/or removing an oxide­induced dead zone in a VCSEL structure is disclosed herein. In general, a VCSEL structure can be formed having at least one oxide layer and an oxide-induced dead zone thereof. A thermal annealing operation can then be performed upon the VCSEL structure to remove the oxide-induced dead zone, thereby permitting oxide VCSEL structures thereof to be reliably and consistently fabricated. An oxidation operation may initially be performed upon the VCSEL structure to form the oxide layer and the associated oxide­induced dead zone. The thermal annealing operation is preferably performed upon the VCSEL after performing a wet oxidation operation upon the VCSEL structure.