| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atomic force microscope having high usability and high measuring precision, and a method therefor. <P>SOLUTION: This atomic force microscope (AFM) 102 for inspecting a sample 124 includes a probe assembly 106 including a first tip 302 and a second tip 304 directed respectively to a surface 131 of the sample 124. The atomic force microscope (AFM) 102 includes also an electric power source 130 for impressing a potential between the first tip 302 and the second tip 304, at least one mechanism 108 for generating relative motion between a probe and the surface 131, and at least one sensor 132 for detecting a current flowing between the first tip 302 and the second tip 304. <P>COPYRIGHT: (C)2004,JPO |
