| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for cleaning optical element that can remove stains such as organisms that are attached to and left on the optical element, a cleaned body, in a cheap, effective and easy manner and without giving damage to the optical element. SOLUTION: In the device and the method for cleaning the optical element that can remove contaminations such as the organisms on the optical element by irradiating vacuum ultraviolent rays, the density of oxygen gas in a cleaning room is adjusted by supplying gas that does not absorb the vacuum ultraviolent rays, and the contaminations on the optical element are removed by the ozone and oxygen radical that are generated by the vacuum ultraviolent rays transmitting through the cleaning room and the vacuum ultraviolent rays left without being absorbed into oxygen in the air based on the adjustment of the density of the oxygen gas. COPYRIGHT: (C)2004,JPO
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