CARBON NITRIDE COATING SYNTHESIZED ON PARTS OF AUTOMOBILE ENGINE AND COATING APPARATUS

摘要

PURPOSE: A carbon nitride coating synthesized on parts for automobile engine is provided which has superior mechanical properties compared to conventional coating by applying carbon nitride (CNx) coating onto the parts for automobile engine, and a coating apparatus for realizing high synthesis speed is provided. CONSTITUTION: In a coating synthesized on a material to be coated selected from parts for automobile engine, the carbon nitride coating synthesized on the parts for automobile engine is characterized in that the coating is a carbon nitride (CNx) layer obtained by adding nitrogen to carbon. In an apparatus comprising a vacuum housing(31) in which a material to be coated is subject to coating treatment, and a vacuum pump(32) installed at the outer side of the vacuum housing to provide internal pressure of the vacuum housing, the coating apparatus comprises magnetron sources(33,34) which are installed at both sides of the vacuum housing oppositely directed to each other, and on any one side of which a solid phase carbon target for synthesizing carbon nitride (CNx) thin film is mounted; a rotational jig(35) which transfers the material to be coated so that the material to be coated passes by the front side of the magnetron sources in the vacuum housing, and which is insulated with the vacuum housing so that a DC bias voltage (-) is impressed to the rotational jig; and a gas control part(36) which is arranged at the outer side of the vacuum housing and connected to the inner part of the vacuum housing, and which controls supply of flow rate of N2 and Ar gases for synthesizing the carbon nitride (CNx) thin film, wherein a material selected from Cr, Si, W and Ti is mounted on the other side of the magnetron sources as a target to relieve cohesive force and residual stress of coating.