| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing high purity helium of 99.99 mol% or more by using crude helium having a purity of approximately 40-90 mol% with less energy consumption, a simple system configuration and excellent economical efficiency. SOLUTION: According to this production method, the high purity helium of 99.99 mol% or more is produced by making the crude helium having a concentration of 40-90 mol% penetrate through at least a separation membrane module, which is prepared by bundling a hollow glass fiber membrane, without using a PSA (pressure swing adsorption) apparatus while using a simple device configuration. COPYRIGHT: (C)2004,JPO
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