| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to make a practical photonic crystal. SOLUTION: The photonic crystal having a column array structure is made by forming a metal thin film pattern (gold pattern) 25 on the surface of the (111) face single crystal silicon layer 23 on a substance layer (silicon dioxide layer)22 different from silicon in refractive index and growing silicon single crystal columns 26 on a metal thin film pattern formation part in a high- temperature silicon tetrachloride gas atmosphere to form the columns. Thus, columns having a very smooth surface, at most 10 nm in terms of a centerline average roughness Ra can be obtained. COPYRIGHT: (C)2004,JPO |
