| 摘要 |
PROBLEM TO BE SOLVED: To set parameters optimal for inspection readily. SOLUTION: Any one of an over detection-suppressing mode or a detection mode of not yet detected defects is specified, and when the over detection- suppressing mode is specified, parameters corresponding to the feature amount at false defect parts, not required to be detected, among candidates of defect part are determined and candidates of defect part other than those being detected by these parameters are then extracted. On the other hand, when the detection mode of not yet detected defects is specified, parameters corresponding to the feature amount at defect parts, required to be detected, among candidates of defect part are determined and all defect parts being detected by these parameters are extracted. COPYRIGHT: (C)2004,JPO
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