| 摘要 |
<p>A manifold comprising a container having two ports (410,412); a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve (442) having two diaphragm valves (MV3,AV4), each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve (448) having two diaphragm valves (AV7,AV8), having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet. <IMAGE></p> |
