| 摘要 |
PROBLEM TO BE SOLVED: To provide a precision alignment apparatus in which a marker of high visibility is attached to a workpiece and uses pattern recognition which enables a fine work matching a purpose of the work. SOLUTION: In the precision alignment apparatus, a plate (a liquid crystal display substrate) 27 of a light emitting element is set on a stage 19 and a stage 24, a pattern of the substrate 27 is controlled, and a place to be spotted is marked (turned on). Turned-on positions are stored sequentially on a memory as image information by an image sensor 17 via a condensing lens 18. A pattern of image data on the stored memory is collated with a previously fetched pattern, and an instruction is transmitted to respective power-supply devices 25, 22 in order to drive an X-stage motor 26 and a Y-stage motor 23 by a motor control unit 21 so that the patterns are matched. COPYRIGHT: (C)2004,JPO
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