INFRARED SENSOR AND INFRARED SENSOR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a thermal infrared sensor and an infrared sensor array having a high detection sensitivity to infrared rays of a predetermined wavelength band. SOLUTION: The thermal infrared sensor for detecting the infrared rays of the predetermined wavelength band includes a substrate: a detecting part supported on the substrate by leg parts and having both a temperature detecting film and infrared reflecting films, and an approximately flat infrared absorbing film supported on the detecting part by a supporting part. The infrared absorbing film is arranged on the surface of the infrared reflecting films in such a way as to be inclined from a state in parallel with the surface of the infrared reflecting film. The thermal infrared sensor includes two layers of the infrared reflecting films of different optical distances from the infrared absorbing film. COPYRIGHT: (C)2004,JPO