| 摘要 |
PROBLEM TO BE SOLVED: To provide a super-high evacuation device, an evaluation method, and a sputter ion pump capable of providing a super-high vacuum range of pressure of 10<SP>-12</SP>Pa or less. SOLUTION: This super-high evacuation device is provided for evacuating a vacuum container 1 to a super-high vacuum state of 10<SP>-12</SP>Pa or less. It is provided with a non-evaporation getter pump (NEG) to heat-treat getter material, adsorb gas, and evacuate it, a sputter ion pump (SIP) comprising a pair of magnets disposed to face each other, a pair of cathodes disposed to face each other on the inner side of the magnets, and a plurality of anodes 8 in a cylinder form on the inner side of the cathodes, and an evacuation accelerating supply device (C-FEG) to supply evacuation accelerating material to accelerate evacuation of gas in the vacuum container 1 in the super-high vacuum state. COPYRIGHT: (C)2004,JPO
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