SYSTEM FOR INTERLOCKING WAFER HANDLING OPERATION BY DETECTING DEVIATION OF DISC OF ION IMPLANTATION EQUIPMENT

摘要

PURPOSE: A system for interlocking a wafer handling operation by detecting the deviation of a disc of an ion implantation equipment is provided to be capable of reducing the maintenance time of the ion implantation equipment and preventing the generation of a broken wafer. CONSTITUTION: A system for interlocking a wafer handling operation by detecting the deviation of a disc of an ion implantation equipment is provided with a disc(100), a plurality of disc sites(200) having a plurality of pin holes(210,230), installed at the upper portion of the disc for loading a wafer, and a pin assembly(300) having a plurality of pins(315,335), for being moved upward when carrying out a wafer handling operation. The system further includes a wafer handler controller for interlocking the wafer handling operation when the pins contact the disc site.