| 摘要 |
PROBLEM TO BE SOLVED: To draw out the electrodes of a gas sensor formed on a silicon substrate and used at a high temperature to the outside while assuring an airtightness. SOLUTION: In order to provide the gas sensor having a gas channel formed in a space between the silicon substrate 2 and a glass substrate 1, the upper surface of the substrate 2 is etched, an insulating layer 5 is formed, and the electrode 4 is provided by electrode-patterning. A recess 9 is formed at the substrate 1 side so that the step generated on the layer 5 at the edge of an electrode pattern may not be engaged with a connecting surface 6, a through hole 8 is opened at the position corresponding to the electrode 4, and an electrode 3 is provided. With the electrodes 7, 6 as references, the substrate 2 is anode connected to the substrate 1 by working so that the sum of the height of the surface of the electrode on the substrate 2 and the height of the surface of the electrode on the substrate 1 becomes positive, and the electrode 4 of the sensor is drawn to the outside while assuring the airtightness. COPYRIGHT: (C)2004,JPO
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