| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for performance test that enables an easy performance evaluation in a new X-ray microscope with which a sample is observed by transducing an X-ray image of it into an electron image of it. SOLUTION: An electron gun 20 is provided in the position opposite to an electron image enlargement mechanism 1. An electron beam passage 40 which is given an electric field shield is formed between the electron gun 20 and a sample holder 3. The running axis of an electron beam emitted from the electron gun 20 is aligned so as to match the central axis of the electron image enlargement mechanism 1, and the position of the central axis of the sample holder 3 is adjusted by aligning it with the running axis of the electron beam. Moreover, an electron beam and X-ray transducing film is placed on the central axis of the sample holder 3, a sample slide is set in a fixed position, and the electron beam from the electron gun 20 is transduced into X-rays and the sample slide is irradiated with it. Enlargement magnification and resolution are measured by accelerating and enlarging generated electrons and measuring them with an electron beam detection element. COPYRIGHT: (C)2004,JPO
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