ELECTROCHEMICAL METHODS FOR POLISHING COPPER FILMS ON SEMICONDUCTOR SUBSTRATES,申请号KR20037009483-传众专利搜索

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发明名称	ELECTROCHEMICAL METHODS FOR POLISHING COPPER FILMS ON SEMICONDUCTOR SUBSTRATES
摘要
申请公布号	KR20030091967(A)	申请公布日期	2003.12.03
申请号	KR20037009483	申请日期	2003.07.16
申请人		发明人
分类号	H01L21/304;C25D3/38;C25D5/18;C25F3/02;H01L21/321;H01L21/3213;H01L21/768	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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