| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester that can stabilize a test by suppressing expansion and contraction of probe needles after contact between the probe needles and a sample and setting an appropriate pressure of contact between the probe needles and the sample. SOLUTION: The semiconductor tester inspects a wafer W mounted on a chuck 22 and kept at a given inspection temperature by placing the probe needles 26 into contact with the wafer W. The semiconductor tester comprises a heat block 41 for keeping the probe needles 26 at the given inspection temperature when the probe needles 26 are in contact therewith. COPYRIGHT: (C)2004,JPO
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