| 摘要 |
PROBLEM TO BE SOLVED: To realize an optical system in which an MTF improving effect can be attained in a high band without relying upon the direction of a pattern on a sample and the polarization state of illumination light can be switched even to linear polarization, as required. SOLUTION: In the defect inspection equipment, a means for focusing the image of an illuminated sample is equipped with an objective lens, aλ/4 plate and aλ/2 plate, whereλis the wavelength, an wavelength switching means for inserting/retracting theλ/4 plate and theλ/2 plate, individually, into/from the optical passage, a partial polarization beam splitter, an analyzer and an imaging lens. COPYRIGHT: (C)2004,JPO
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