MEASURING INSTRUMENT FOR MOLECULAR CONTAMINANT GENERATED FROM CLEAN ROOM CONSTITUTIVE MATERIAL

摘要

PROBLEM TO BE SOLVED: To conduct measurement under a condition approximated to an actual clean room environment, and to provide excellent measuring precision. SOLUTION: This measuring instrument is provided with a measuring container 2 set with a clean room constitutive material, a flow means 3 for allowing carrier gas G to flow in the measuring container 2, and an analyzing means 20 for analyzing an amount of a molecular contaminant in the carrier gas G flowing through the measuring container 2. In addition, a humidity control means 10 is provided to humidity-conditioning the carrier gas G flowing in the measuring container 2 by bubbling one portion of the carrier gas G flowing in the measuring container 2 in pure water W to be mixed thereafter with the rest of the carrier gas G. COPYRIGHT: (C)2004,JPO