CONFIGURABLE VACUUM SYSTEM AND METHOD,申请号KR20027015841-传众专利搜索

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发明名称	CONFIGURABLE VACUUM SYSTEM AND METHOD
摘要
申请公布号	KR20030091651(A)	申请公布日期	2003.12.03
申请号	KR20027015841	申请日期	2002.11.22
申请人		发明人
分类号	C23C14/00;C23C14/24;C23C14/26;C23C14/32;C23C14/34;C23C14/50;H01J37/32	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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