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发明名称
Multi-beam exposure method
摘要
申请公布号
EP1189425(A3)
申请公布日期
2003.12.03
申请号
EP20010117065
申请日期
2001.07.13
申请人
HELL GRAVURE SYSTEMS GMBH
发明人
RESSEL, PETER;SCHEFFLER, ANDREAS
分类号
G06K15/12;H04N1/06;H04N1/191;(IPC1-7):H04N1/191
主分类号
G06K15/12
代理机构
代理人
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