METHOD FOR PRODUCING PARTS AND A VACUUM PROCESSING SYSTEM,申请号EP20020710739-传众专利搜索

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发明名称	METHOD FOR PRODUCING PARTS AND A VACUUM PROCESSING SYSTEM
摘要
申请公布号	EP1366208(A1)	申请公布日期	2003.12.03
申请号	EP20020710739	申请日期	2002.02.14
申请人	UNAXIS BALZERS AKTIENGESELLSCHAFT	发明人	WAGNER, RUDOLF;WILTSCHE, SIEGFRIED;RAMM, JUERGEN
分类号	B01J3/00;B01J3/02;B01J19/08;C23C16/02;C23C16/44;C23C16/503;H01L21/205;H01L21/304;(IPC1-7):C23C16/44;C23C16/42;C23C16/24;C23C16/513;C23C14/56	主分类号	B01J3/00
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