| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diffraction type light modulation device which has high utilization efficiency of light and satisfactory uniformity of brightness of an image and ensures a high contrast even when used in combination with a bright field projection optical system capable of using a small-sized projection lens. <P>SOLUTION: A spatial light modulation device 41 has a plurality of arrayed pixels and periodically performs complex amplitude modulation of incident light in each of the pixels in a predetermined direction, and a complex amplitude modulation pattern in each of the pixels is so determined that when a light beam is made incident, diffracted light 43 of 1st order and diffracted light 44 of -1st order of emission light weaken each other nearby an area where light 42 of 0-th order is present. <P>COPYRIGHT: (C)2004,JPO |
