| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dissolved gas measuring meter which can always correctly measure and can safely and surely calibrate the dissolved gas concentration of a functional water with a gas dissolved therein used in a cleaning step, and to provide a method of measuring the dissolved gas. <P>SOLUTION: The dissolved gas measuring meter has a flow cell provided with a diaphragm type electrode for measuring the dissolved gas concentration. In the meter, a sample water supply duct and a sample water drain duct are provided in the flow cell. When the dissolved gas concentration of the sample water is measured, the sample water is distributed to the flow cell. When the diaphragm type electrode for measuring the dissolved gas concentration is calibrated, the sample water in the cell is drained, and the same gas as or different gas from the dissolved gas is supplied from the gas supply duct to the cell by the operation of a valve. The method of measuring the dissolved gas comprises the steps of correcting the designated value of the diaphragm type electrode for measuring the dissolved gas concentration by fully filling the same gas as the dissolved gas in the cell, and correcting the designated value of the electrode for measuring the concentration to the '0' of the dissolved gas concentration by fully filling different gas from the dissolved gas in the cell. <P>COPYRIGHT: (C)2004,JPO |
