| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring jig and a measuring method of a semiconductor element capable of realizing characteristic measurement in the state of the semiconductor element, and heightening measurement efficiency. SOLUTION: This measuring jig of the semiconductor element has a frame 104 comprising a semiconductor substrate, a cantilever 106 supported inside rockably by an elastic beam part 105, a piezo resistance 107 provided on the beam part 105 and having a resistance value changing by applied acceleration, and an electrode 108 provided on the frame 104, for taking out a signal from the piezo resistance 107. The jig is equipped with a tray 1 having a holding part 11 projecting from the surface on one side, for suppressing play of the semiconductor element, and a cover 2 engaged with the tray 1, for covering its surface. In the jig, a terminal 3 capable of abutting oppositely on the electrode 108 held by the holding part 11 is provided on the surface of the cover 2, facing to the tray, and wiring 4 connected to the terminal 3 and enabling electric connection to the outside is provided. COPYRIGHT: (C)2004,JPO
|
