| 摘要 |
PROBLEM TO BE SOLVED: To make compatible quick analysis and high sensitivity for gas analysis in a gas analyzer. SOLUTION: Vacuum valves 22, 24 are closed and a vacuum valve 30 is opened prior to start of the gas analysis to evacuate insides of an introducing pipe 14 and a branch pipe 26 by a vacuum pump 28, the vacuum valve 30 is closed and the vacuum valve 22 is opened to introduce analysis object gas generated from a load 16 into the introducing pipe 14 and to store it when the load 16 is mounted on a load receiver 18, the vacuum valve 24 is opened to deliver the analysis object gas in the inside of the pipe 14 to the gas analyzer 12 when pressure inside the introducing pipe 14 comes to pressure suitable for the analysis, and the gas analysis is carried out by as mass spectrometry apparatus 12. COPYRIGHT: (C)2004,JPO
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