| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid leakage preventing device with which the jetting distance of a treatment liquid from the space between seal rollers is suppressed to reduce the length of a liquid receiving tank, a work is made wet so that the phenomenon that the surface of the work is dried during its transfer to the following treatment tank and the defect of quality is caused can be prevented, and the resistance of the work on the penetration into the space between the seal rollers is reduced, thereby preventing the running-off of the work from a chuck. SOLUTION: In the liquid leakage preventing device where the side wall through which a work comes in or goes out of the body 1 of a treatment tank is provided with slits 2 and 3 in the vertical direction for allowing the work to come in and go out and liquid leakage is prevented by pairs of seal rollers 6, 6 and 7, 7 arranged adjacently to the slits 2 and 3, liquid feeding mechanisms 8 and 9 for letting liquids fall to the outsides of the seal rollers 6, 6 and 7, 7 from the upper parts are provided. COPYRIGHT: (C)2004,JPO
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