Process for the production of a ferroelectric solid layer using an additive

摘要

Production of a crystalline solid body layer on a substrate (3) by CVD comprises introducing an auxiliary material (H) into the reaction chamber in addition to the starting gases (P) containing the elements of the solid body layer. The auxiliary material is obtained in such a way that it contains molecules which have a dipole moment and the properties to deposit during the deposition process over a short time on the substrate surface to form the crystal structure of the solid body layer. Preferred Features: The auxiliary material is introduced from an external supply such as a supply vessel. The auxiliary material consists of reaction products of the CVD process pumped from the reaction chamber.