| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flowmeter capable of detecting a bidirectional flow rate, linearizing the output characteristic, and obtaining a stable output without deteriorating the responsiveness. <P>SOLUTION: In the thermal flowmeter 1, the main flow passage M is constituted by mounting a laminated body 50 in which a mesh plate 51 is incorporated so that the mesh 51M is disposed between the main flow passage M and a sensor flow passage S, with respect to a flow passage space 44 formed in a body 41. An upstream temperature detection resistor R1, a downstream temperature detection resistor R2, an exothermic resistor Rt, and a fluid temperature detection resistor Rt, are provided to a measurement chip 11. It is controlled by an electric circuit so that the temperature difference between an exothermic resistor Rh and the fluid temperature detection resistor Rt is constant. The flow rate of the fluid to be measured is measured on the basis of the temperature difference between the upstream temperature detection resistor R1 and the downstream temperature detection resistor R2. <P>COPYRIGHT: (C)2004,JPO</p> |
