| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an abrasive composition excellent in both abrasive rate and abrasive accuracy. <P>SOLUTION: The abrasive composition comprises mixed particles of silica particles A in which hardness is increased by introducing a dope element with silica particles B without introducing the dope element. In the abrasive composition, a mixed ratio of the silica particles A with the silica particles B is preferably 0.5-2.0 and average primary particle diameter of silica particles A is 5-60 nm and average primary particle diameter of silica particles B is 1-100 nm. Slurry having the mixed particles has low viscosity and small change of viscosity with time while keeping high concentration. Consequently, the abrasive composition has relatively fast abrasion rate and excellent abrasive accuracy in chemical polishing, etc. <P>COPYRIGHT: (C)2004,JPO</p> |
