| 摘要 |
PROBLEM TO BE SOLVED: To suppress lowering of test efficiency due to a temperature skew correcting function. SOLUTION: In the semiconductor integrated circuit test system performing test of a device X being measured under test conditions corresponding to the ambient temperature, the detection value of a temperature sensor 2a for detecting the ambient temperature at the time of test is compared with a prestored temperature evaluation value and the device X being measured is tested by setting specific test conditions depending on the comparison results. COPYRIGHT: (C)2004,JPO
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