| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem in conventional technology that positional displacement of a head plate caused by thermal expansion can not be prevented although thermal deformation, etc., of a probe card itself can be prevented. SOLUTION: This inspection device 10 is equipped with a temperature- adjustable main chuck 16 moveably disposed within a prober chamber 12, the probe card 18 disposed above the main chuck 16, and the head plate 21 for fixing the probe card 18, and characterized by being provided with a heater circuit 23 in the head plate 21. COPYRIGHT: (C)2004,JPO
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