| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card equipped with a fine and highly-accurate probe pin. SOLUTION: This probe card to be electrically connected to an electronic device is equipped with the probe pin to be electrically connected to the electronic device, and a wiring substrate having wiring to be electrically connected to the probe pin. The probe pin has a first end to be electrically connected to the wiring, a contact part elongated from the first end in the separating direction from the wiring substrate, formed oppositely to the wiring substrate, and connected electrically to the electronic device, a second end formed elongatively from the contact part, and connected electrically to the wiring, and a cavity part formed on a region sandwiched between the wiring substrate and the contact part. COPYRIGHT: (C)2004,JPO
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