| 摘要 |
There is produced a method of producing a multilayer piezoelectric element 2 comprising an element body 10 wherein piezoelectric layers 8 and internal electrode layers 4 and 6 are alternately stacked. The piezoelectric layer 8 is composed of a piezoelectric ceramic. The piezoelectric ceramic includes a compound oxide having a perovskite structure. The compound oxide contains at least lead, zirconium and titanium. The method uses a material mixture of a 90%-cummulated particle diameter of 1µm or less, containing compounds of at least lead, zirconium and titanium. The method includes the steps of producing a piezoelectric layer ceramic green sheet, forming a pre-fired element body by alternately stacking the produced piezoelectric ceramic green sheets and internal electrode layer precursor layers, and forming said element body 10 by performing main firing on the pre-fired element body at a temperature of 1100°C or lower. According to the method, a multilayer piezoelectric element 2 having piezoelectric layers 8 composed of a pieaoelactric ceramic using an inexpensive metal as internal electrodes, by which the piezoelectric properties are hardly deteriorated can be produced. |
