| 发明名称 |
METHOD AND DEVICE FOR VIBRATION CONTROL |
| 摘要 |
<p>A modular pack or card (40) is attached to a structure (20) using adhesive and has electrical connectors for connection to a multiple-pin socket that may connect it to a simplified control system (50). The modular pack may include planar low profile circuit elements receiving signals from displacement sensors and actuating actuators in order to stabilize the wafer stage base.</p> |
| 申请公布号 |
EP1366390(A2) |
申请公布日期 |
2003.12.03 |
| 申请号 |
EP20020733831 |
申请日期 |
2002.03.07 |
| 申请人 |
ACTIVE CONTROL EXPERTS INC. |
发明人 |
PLETNER, BARUCH;PERKINS, RICHARD;LUBLIN, LEONARD |
| 分类号 |
H01L21/027;F16F15/00;F16F15/02;F16F15/027;G03F7/20;G05D19/02;H01L41/047;H01L41/053;H01L41/09;H04R17/08;(IPC1-7):G03F7/20 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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