VOLTAGE PROBE, INSPECTION METHOD OF SEMICONDUCTOR DEVICE USING IT, AND SEMICONDUCTOR DEVICE HAVING MONITOR FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a voltage probe capable of performing comfortable real- time trace at the development time, without disposing a special connection terminal for monitoring on an LSI itself, and without enlarging the LSI scale for mass production.

SOLUTION: This voltage probe is characterized by including a voltage probe chip 200 equipped with a sensor electrode 204 constituted allocatably so as to face to a signal wire 104 to be monitored on a semiconductor chip 100, for detecting a voltage change of the signal wire as an induced voltage by electrostatic induction.

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