发明名称 |
System for inspecting microscopic samples with a scanning microscope |
摘要 |
The inventive system comprises a scanning microscope with at least one monitor, a computer and inputting means. Furthermore, at least one laser and control electronics are provided. All of these elements can be arranged on a table top. The laser and the control electronics are stored in a electromagnetically shielded housing wherein the housing can be completely stored under the table top. The housing comprises an U-shaped control panel which embraces a part of the table top when the housing is stored completely under the table top.
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申请公布号 |
US6657187(B2) |
申请公布日期 |
2003.12.02 |
申请号 |
US20010817583 |
申请日期 |
2001.03.26 |
申请人 |
LECIA MICROSYSTEMS HEIDELBERG GMBH |
发明人 |
ENGELHARDT JOHANN |
分类号 |
G02B21/00;(IPC1-7):H01J37/00 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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