发明名称 System for inspecting microscopic samples with a scanning microscope
摘要 The inventive system comprises a scanning microscope with at least one monitor, a computer and inputting means. Furthermore, at least one laser and control electronics are provided. All of these elements can be arranged on a table top. The laser and the control electronics are stored in a electromagnetically shielded housing wherein the housing can be completely stored under the table top. The housing comprises an U-shaped control panel which embraces a part of the table top when the housing is stored completely under the table top.
申请公布号 US6657187(B2) 申请公布日期 2003.12.02
申请号 US20010817583 申请日期 2001.03.26
申请人 LECIA MICROSYSTEMS HEIDELBERG GMBH 发明人 ENGELHARDT JOHANN
分类号 G02B21/00;(IPC1-7):H01J37/00 主分类号 G02B21/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利