| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dresser for a polishing tool having a long service life, capable of stabilizing the quality relating to a surface condition of the polishing tool, and to provide a dressing method of the polishing tool by using the dresser. <P>SOLUTION: This dresser 1 has a dresser body 3 made out of metallic binding material 5 to which a number of abrasive grains 4 are bounded. A number of abrasive grains 4 are three-dimensionally dispersed to the dresser body 3. The dresser body 3 is preferably configurated by an electrocast product. An average size of the abrasive grains is preferably 5-1000 μm. <P>COPYRIGHT: (C)2004,JPO |
