| 摘要 |
PROBLEM TO BE SOLVED: To guide a discharge gas from a pump into a gas flow pipe in a stable state without any disturbance and to enhance the degree of accuracy in the detection of an angular velocity by arranging a gas discharge port and a gas introduction port oppositely to each other while nearly aligning the respective central axes, and setting the inner diameter of a reception port member shorter than the length of the short side of the gas introduction port. SOLUTION: The gas discharge port 78 of a piezoelectric pump 7 is connected to the gas introduction port 56 of a sensor chip 5 via a reception port 59 and a joint tube 60. A ceramic reception port 59 consists of a base part 59a in a circular plate being bonded to be mounted to the gas introduction port 56 and its upper cylindrical part 59b, and a through hole is made in the upper and lower directions. A center Q3 of the gas introduction port 56, a center Q4 of the port 59, and a center Q1 of the gas discharge port 78 are set to be concentric to one another, and a length B of the short side of the gas introduction port 56 is formed larger than an inner diameter ϕA3 of the port 59, thus the gas discharged from the gas discharge port 78 is introduced into the sensor chip 5 in a stable state without causing disturbance. |
