| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow a glass/ceramic substrate to contract only in the thickness direction during sintering, while preventing contraction in the plane direction by mounting green sheets on both surfaces of a pre-sintering multi-layer glass/ ceramic substrate for forming a laminate and then sintering it. SOLUTION: A multi-layer glass/ceramic substrate green laminate comprising on its both surfaces a green sheet 1 comprising a composition containing at least one kind of quartz, cristobalite and tridymite or a composition containing a sintering assisting agent, or a green sheets 1 comprising a composition containing a tridymite which is sintered at a sintering temperature of a multi- layer glass/ceramic substrate material and an oxide which is not sintered in the sintering process, is sintered. By removing the compositions on both surfaces, a multi-layer glass/ceramic substrate is obtained. Thus, the change in sizes between before sintering and after sintering are canceled out, so that a substrate without contraction in the plane direction is obtained.</p> |
