| 摘要 |
PROBLEM TO BE SOLVED: To provide an effective means for blocking/removing the deposition of a solid matter of a coating solution which is caused by the drying of a head tip and results in the quality deterioration of a slit coat. SOLUTION: An ultrasonic vibrator is installed in a bath filled with the cleaning solution and the head tip is soaked in the bath, while being excited. The cleaning solution is heated or discharged from the head according to necessity and thus these remedial measures become more effective. COPYRIGHT: (C)2004,JPO
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